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Materials Transactions

Volumn 43, Issue 5, 2002, Pages 871-875

Composition control of r.f.-sputtered Ni2MnGa thin films using optical emission spectroscopy

(2) Wu, Shyi Kaan a Tseng, Kuan Hua a

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

Author keywords

Argon pressure effect; Ni2MnGa shape memory alloys; Optical spectroscopy; r.f. sputtering

Indexed keywords

COMPOSITION; EMISSION SPECTROSCOPY; FERROMAGNETISM; LIGHT EMISSION; NICKEL ALLOYS; SHAPE MEMORY EFFECT; SPECTRUM ANALYSIS; SPUTTERING; SUBSTRATES;

OPTICAL EMISSION SPECTROSCOPY;

THIN FILMS;

EID: 0036577895 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.43.871 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.