Microscreen-based replication of electroforming micromolds

Microsystem Technologies

Volumn 8, Issue 2-3, 2002, Pages 78-82

  Domeier, L A ^a   Gonzales, M ^a   Hachman, J ^a   Hruby, J M ^a   Janek, R ^a   Morales, A M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE PLASTICS; ELECTROFORMING; MICROSTRUCTURE; PLASTIC MOLDS; POROUS MATERIALS;

PLASTIC MICROMOLDS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036575059     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0135-9     Document Type: Conference Paper

References (12)

1. Materials of LIGA technology
2. LIGA technologies and applications
3. Injection modeling and related techniques the fabrication of microstructures
4. Injection modeling of polymeric LIGa HARMs
5. Chemical deposition of metals for the formation of microstructures: An alternative method to galvanoforming?
6. LIGA: Metals, plastics and ceramics