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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 468-472

Copper ion implantation and laser annealing of silica

(3) Stepanov, A L a,b Hole, D E c Townsend, P D c

a RWTH AACHEN UNIVERSITY (Germany)

b ZAVOISKY PHYSICAL TECHNICAL INSTITUTE (Russian Federation)

c UNIVERSITY OF SUSSEX (United Kingdom)

Author keywords

Ion implantation; Laser annealing; Nanoparticles; Optical reflectance

Indexed keywords

ANNEALING; COPPER; EXCIMER LASERS; ION IMPLANTATION; LASER PULSES; LIGHT REFLECTION; LIGHT TRANSMISSION; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS;

LASER ANNEALING;

FUSED SILICA;

EID: 0036573849 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(02)00594-3 Document Type: Article

Times cited : (19)

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