Cathodoluminescence from BN buried layers by high-dose ion implantation

Journal of Applied Physics

Volumn 91, Issue 9, 2002, Pages 6209-6211

  Barbadillo, L ^a   Cervera, M ^a   Hernandez M J ^a   Rodriguez P ^a   Piqueras, J ^a   Martinez O ^b   Avella, M ^b   Jimenez J ^b  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b UNIVERSITY OF VALLADOLID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BROAD EMISSION BANDS; BURIED LAYER; CARBON IONS; CUBIC PHASE; HEXAGONAL CONFIGURATION; HIGH-DOSE ION IMPLANTATION; IMPLANTED SAMPLES; INFRARED SPECTRUM;

ION IMPLANTATION;

SILICON WAFERS;

EID: 0036573268     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1462840     Document Type: Article

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