A new structured ISFET with integrated Ti/Pd/Ag/AgCl electrode and micromachined back-side P+ contacts

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers, Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Volumn 25, Issue 3, 2002, Pages 327-334

  Huang, I Yu ^a   Huang, Ruey Shing ^a   Lo, Lieh Hsi ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Ag AgCl electrode; Ion sensor; ISFET; pH sensor

Indexed keywords

ELECTRODES; HYSTERESIS; MICROPROCESSOR CHIPS; PH SENSORS; POSITIVE IONS; SILICA; TANTALUM COMPOUNDS; TITANIUM COMPOUNDS;

ION SENSOR;

ION SENSITIVE FIELD EFFECT TRANSISTORS;

EID: 0036573212     PISSN: 02533839     EISSN: None     Source Type: Journal    
DOI: 10.1080/02533839.2002.9670707     Document Type: Article

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