Slow pH response effects of silicon nitride ISFET sensors

Sensors and Actuators, B: Chemical

Volumn 48, Issue 1-3, 1998, Pages 501-504

  Woias, P ^a   Meixner, L ^b   Frostl P ^b  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

ISFET; pH measurement; Silicon nitride gate insulator; Slow pH response

Indexed keywords

EID: 0346410166     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00032-X     Document Type: Article

References (11)

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