Random stopping power and energy straggling of 16O ions into amorphous Si target

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 79-83

  Araujo, L L ^a   Grande, P L ^a   Behar, M ^a   Dos Santos, J H R ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Energy loss; Energy straggling; Oxygen; RBS; Silicon; Stopping power

Indexed keywords

AMORPHOUS SILICON; ENERGY DISSIPATION; ION IMPLANTATION; MONTE CARLO METHODS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

STOPPING POWER;

OXYGEN;

EID: 0036570027     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01174-0     Document Type: Conference Paper

References (9)