Hydrogen depth resolution in multilayer metal structures, comparison of elastic recoil detection and resonant nuclear reaction method

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 693-698

  Wielunski, L S ^a,c   Grambole, D ^b   Kreissig, U ^b   Grotzschel R ^b   Harding, G ^c   Szilagyi E ^d  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c KFKI Research Institute for Particle and Nuclear Physics ^*  (Australia)

^d WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

Elastic recoil detection; Heavy ion elastic rocoil detection; Hydrogen depth profiling; Ion multiple scattering; Nuclear reaction annalysis

Indexed keywords

HEAVY METALS; HYDROGEN; RESONANCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCATTERING; SENSITIVITY ANALYSIS; STRUCTURAL ANALYSIS; SURFACE MEASUREMENT;

ELASTIC RECOIL DETECTION;

MULTILAYERS;

EID: 0036569715     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01179-X     Document Type: Conference Paper

References (14)