Theoretical approximation of energy distribution of elastically recoiled hydrogen atoms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 701-706

  Szilagyi E ^a   Wielunski, L S ^b   Paszti F ^a  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b CSIRO   (Australia)

Author keywords

Ion beam analysis; Multiple scattering; Thin films

Indexed keywords

ALUMINUM; AMORPHOUS FILMS; APPROXIMATION THEORY; COMPUTER SOFTWARE; COPPER; FILM PREPARATION; GOLD; HYDROGEN; ION BEAMS; METALLIC FILMS; SILVER; THIN FILMS;

DEPTH PROFILING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); ION BEAM ANALYSIS (IBA); MULTIPLE SCATTERING; SOFTWARE PACKAGE DEPTH;

ATOMIC PHYSICS;

EID: 0032017648     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00780-5     Document Type: Article

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