Ion-induced photon spectroscopy of insulators and application to in-situ diagnostics of nanoparticle formation processes

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 207-211

  Kishimoto, N ^a   Bandourko, V V ^a,b   Takeda, Y ^a   Umeda, N ^c   Lee, C G ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b NATIONAL RESEARCH NUCLEAR UNIVERSITY MEPHI   (Russian Federation)

^c UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

In situ diagnostics; Insulators; Ion induced photon spectroscopy; Nanoparticle; Negative ion implantation

Indexed keywords

CHARGE COUPLED DEVICES; HEAVY IONS; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; LIGHT EMISSION; PHOTONS; SPECTROSCOPY;

ION-INDUCED PHOTON SPECTROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 0036569185     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01299-X     Document Type: Conference Paper

References (17)