Ion implantation of rare earth ions for light emitters

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 40-46

  Buchal, Ch ^a   Wang, S ^a   Lu, F ^a   Carius, R ^a   Coffa, S ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b CNR IMETEM   (Italy)

Author keywords

Electroluminescence; Ion implantation; Optical emitters; Rare earth

Indexed keywords

ELECTRIC INSULATORS; ELECTROLUMINESCENCE; INFRARED RADIATION; MICROELECTRONICS; RARE EARTH COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; TRANSISTORS;

RARE EARTH IONS;

ION IMPLANTATION;

EID: 0036568873     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01171-5     Document Type: Conference Paper

References (29)

1. Flat-panel displays and sensors - Principles, materials and processes
2. Photonic applications of rare-earth-doped materials
3. Silicon-based optoelectronics