Orientation selective growth of MgO films on Si (100) by pulsed laser deposition

Applied Physics A: Materials Science and Processing

Volumn 74, Issue 5, 2002, Pages 703-706

  Chen, X Y ^a   Wong, K H ^a   Mak, C L ^a   Liu, J M ^b   Yin, X B ^b   Wang, M ^b   Liu, Z G ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MAGNESIA; MOLECULAR ORIENTATION; PRESSURE EFFECTS; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS;

SINGLE-ORIENTED FILMS;

FILM GROWTH;

EID: 0036568594     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100940     Document Type: Article

References (23)