Ab initio molecular orbital characterization of dimethyl group-III azides as sources for photolytic production of free radical beams

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 995-998

  Hayashi, Keiji ^a   Kanayama, Takuo ^a   Shimizu, Toyohiro ^a   Kawamura, Yasunori ^a   Kameko, Kenji ^a   Kawakita, Seiji ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COMPUTER SIMULATION; ELECTRONIC STRUCTURE; ENERGY GAP; EPITAXIAL GROWTH; FREE RADICALS; LOW TEMPERATURE OPERATIONS; MOLECULAR STRUCTURE; PERTURBATION TECHNIQUES; PHOTOLYSIS; PYROLYSIS;

DIMETHYLALUMINUM AZIDE; DIMETHYLALUMINUMNITRENE; DIMETHYLBORON AZIDE; DIMETHYLBORONNITRENE; DIMETHYLGALLIUM AZIDE; DIMETHYLGALLIUMNITRENE; MOLECULAR ORBITAL CHARACTERIZATION; PHOTODISSOCIATION OF ENERGETIC COMPOUND BEAMS; SOFTWARE PACKAGE GAUSSIAN; UNIMOLECULAR METASTABLE DYE;

NITROGEN COMPOUNDS;

EID: 0036564775     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1460895     Document Type: Article

References (10)