A new method for generating a refined beam of neutral radicals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 918-921

  Hayashi, Keiji ^a   Sakudo, Noriyuki ^a   Noda, Takaaki ^a   Takeda, Akihiro ^a   Fujimura, Kiyonobu ^a   Shimizu, Noriyoshi ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NITROGEN; SURFACE TREATMENT;

PHOTODEIONIZATION OF NEGATIVE ION BEAM (PDINIB); REFINED BEAM OF NEUTRAL RADICALS (RBNR);

ION BEAMS;

EID: 0031547932     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00031-1     Document Type: Article

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3. T. Mizutani, J. Non-Cryst. Solids 181 (1995) 123.
4. H. Hotop and W.C. Lineberger, J. Phys. Chem. Ref. Data 4 (1975) 539.
5. B.L. Moiseiwitsch, in: Atomic Processes and Applications, eds. P.G. Burke and B.L. Moiseiwitsch (North-Holland, Amsterdam, 1976) chap. 9.
6. S.E. Novick, P.C. Engelking, P.L. Jones, J.H. Futrell and W.C. Lineberger, J. Chem. Phys. 70 (1979) 2652.