Routes for the integration of high and low dielectric constant oxides on InP

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 183-187

  Vasco, E ^a   Zaldo, C ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Dielectric oxides; Ferroelectrics; InP

Indexed keywords

CRYSTALLINE MATERIALS; DIFFUSION IN SOLIDS; INDIUM COMPOUNDS; MORPHOLOGY; PERMITTIVITY; PULSED LASER DEPOSITION; SURFACE TOPOGRAPHY; TEXTURES;

INCUBATION;

SINGLE CRYSTALS;

EID: 0036557642     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00109-9     Document Type: Conference Paper

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