Micro detection system with nm resolution using self-focal confocal microscope

Guangdianzi Jiguang/Journal of Optoelectronics Laser

Volumn 13, Issue 4, 2002, Pages 374-377

  Zhang, Jie ^a   Tan, Jiu Bin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Confocal microscope; Gradient index lens; High resolution; Noncontact measurement; Optical focus detection

Indexed keywords

DISTANCE MEASUREMENT; GRADIENT INDEX OPTICS; SIZE DETERMINATION;

CONFOCAL MICROSCOPE; GRADIENT INDEX LENS; HIGH RESOLUTION; NONCONTACT MEASUREMENT; OPTICAL FOCUS DETECTION;

MICROSCOPIC EXAMINATION;

EID: 0036552201     PISSN: 10050086     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

1. The extend-focus, auto-focus and surface-profiling techniques of confocal microscopy
2. Highly accurate non-contact characterization of engineering surfaces using confocal microscopy
3. Fiber-optic confocal micro-scope: FOCON
4. Semiconductor laser confocal and interference microscopy
5. Fibre-optical confocal scanning interference microscopy
6. Noninterferometric differential confocal microscopy with 2 nm depth resolution
7. Depth response of scanning microscopes
8. Depth response of confocal optical microscopes
9. Size of the detector in confocal imaging systems
10. Effect of detector displacement in confocal imaging systems
11. Applications of GRIN rod lenses in optical fiber commun