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Volumn 85, Issue 4, 2002, Pages 865-872
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Oxidation studies of aluminum-implanted NBD 200 silicon nitride
a,c a,c b |
Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
ALUMINUM;
DIFFUSION;
ION IMPLANTATION;
OXIDATION;
OXIDATION RESISTANCE;
RATE LAW;
SILICON NITRIDE;
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EID: 0036544970
PISSN: 00027820
EISSN: None
Source Type: Journal
DOI: 10.1111/j.1151-2916.2002.tb00185.x Document Type: Article |
Times cited : (7)
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References (21)
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