Comparison of high-resistivity ZnO films sputtered on different substrates

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 4 A, 2002, Pages

  Lin, Gong Ru ^a,b   Wang, S C ^a,b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Contact resistance; High resistivity; Sheet resistance; Transmission line method; ZnO

Indexed keywords

CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY; ENERGY GAP; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

SHEET RESISTANCE;

THIN FILMS;

EID: 0036544439     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l398     Document Type: Article

References (18)