Novel surface-micromachined low-power fuses for on-chip calibration

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 173-178

  Maier Schneider, Dieter ^a   Kolb, Stefan ^a   Winkler, Bernhard ^a   Werner, Wolfgang M ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Low power fuse; Polysilicon fuse; Sensor calibration; Surface micromachining

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; MICROMACHINING; POLYSILICON; PROM;

LOW-POWER FUSE; ON-CHIP CALIBRATION; POLYSILICON FUSE;

SENSORS;

EID: 0036544161     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00035-3     Document Type: Conference Paper

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