Thermal assembly of polysilicon microactuators with narrow-gap electrostatic comb drive

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 63-68

  Fedder, G K ^a   Chang, J C ^a   Howe, R T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MICROMACHINING; SEMICONDUCTING SILICON;

ALUMINUM MICROBRIDGE; NARROW-GAP ELECTROSTATIC COMB DRIVE; POLYSILICON FUSE AND WEL MICROSTRUCTURE; POLYSILICON MICROACTUATORS; THERMAL ASSEMBLY;

ACTUATORS;

EID: 0026961419     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)