SCOPUS 정보 검색 플랫폼

Journal of Non-Crystalline Solids

Volumn 299-302, Issue , 2002, Pages 205-209

Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon

(6) Borzi, R a Fedders, P A b Chan, P H b Herberg, J b Leopold, D J b Norberg, R E b

a IMEC (Belgium)

b WASHINGTON UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CRYSTAL DEFECTS; DEUTERIUM; ELECTRON TRAPS; HYDROGEN BONDS; HYDROGENATION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTOVOLTAIC EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

INTERSTITIAL MOLECULAR HYDROGEN; PHOTOVOLTAIC QUALITY;

AMORPHOUS SILICON;

EID: 0036540489 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(01)01003-1 Document Type: Article

Times cited : (6)

References (8)

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