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Volumn 299, Issue 302, 2002, Pages 103-107

Influence of growth temperature on the microcrystallinity and native defect structure of hydrogenated amorphous silicon

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; HYDROGENATION; MICROSTRUCTURE; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

EID: 0036539759     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01185-1     Document Type: Article
Times cited : (9)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.