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Journal of Non-Crystalline Solids

Volumn 299-302, Issue , 2002, Pages 42-47

Complex dynamics during the reactive scattering of Si+ (2P) and H2

(3) Chaâbane, Nihed a Vach, Holger a Peslherbe, Gilles H b

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

b Dept of Electrical and Computer Engineering (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER; KINETIC ENERGY; MICROELECTRONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCATTERING;

REACTIVE SCATTERING;

SILANES;

EID: 0036539059 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(01)00944-9 Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.