SCOPUS 정보 검색 플랫폼

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 434-437

Semiempirical direct dynamics trajectory study of the Si+ (2P) + H2 → SiH+ + H reaction

(3) Chaabane N a Vach, H a Peslherbe, G H b

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

b Gina Cody School of Engineering and Computer Science (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON TRANSPORT PROPERTIES; HYDROGENATION; INTEGRATED CIRCUIT MANUFACTURE; ION BEAMS; KINETIC ENERGY; MICROELECTRONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM THEORY; REACTION KINETICS;

NEWTONIAN EQUATIONS; POLYMORPHOUS SILICON; QUANTUM CHEMISTRY;

SILICON;

EID: 6444230554 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (2)

References (17)

1
- 24444468650
- M. J. S. Dewar and W. Thiel. J. Am. Chem. Soc., 99:4899, 1977.
- (1977) J. Am. Chem. Soc. , vol.99 , pp. 4899
- Dewar, M.J.S.¹ Thiel, W.²

2
- 0842341771
- M. J. S. Dewar, E. G. Zoebisch, E. F. Healy, and J. J. P. stewart. J. Am. Chem. Soc., 107:3902, 1985.
- (1985) J. Am. Chem. Soc. , vol.107 , pp. 3902
- Dewar, M.J.S.¹ Zoebisch, E.G.² Healy, E.F.³ Stewart, J.J.P.⁴

3
- 0000138914
- J. L. Elkind and P. B. Armentrout. J. Phys. Chem, 88:5454, 1984.
- (1984) J. Phys. Chem , vol.88 , pp. 5454
- Elkind, J.L.¹ Armentrout, P.B.²

4
- 36549096255
- K. Ervin and P. B. Armentrout. J. Chem. Phys, 80:2978, 1984.
- (1984) J. Chem. Phys , vol.80 , pp. 2978
- Ervin, K.¹ Armentrout, P.B.²

5
- 6444223938
- J. B. Foresman and A. Frisch. Gaussian, Inc. Pittsburg, PA, 1996
- J. B. Foresman and A. Frisch. Gaussian, Inc. Pittsburg, PA, 1996.

6
- 0348137163
- P. R. i cabarrocas. J. Non Cryst. Solids, 266-269:31, 2000.
- (2000) J. Non Cryst. Solids , vol.266-269 , pp. 31
- Cabarrocas, P.R.I.¹

7
- 0002759503
- P. R. i cabarrocas, P. Stahel, S. Hamma, and Y. Poissant. In Procd. 2nd World Conference on Photovoltaic solar energy conversion, page 355, 1998.
- (1998) Procd. 2nd World Conference on Photovoltaic Solar Energy Conversion , pp. 355
- Cabarrocas, P.R.I.¹ Stahel, P.² Hamma, S.³ Poissant, Y.⁴

8
- 0001203711
- M. Kent, K. Ervin, and P. B. Armentrout. J. Chem. Phys, 84:6750, 1986.
- (1986) J. Chem. Phys , vol.84 , pp. 6750
- Kent, M.¹ Ervin, K.² Armentrout, P.B.³

9
- 0000671779
- U. Kroll, J. Meier, A. Shah, S. Mikhailov, and J. Weber. J. Appl. Phys, 80:4971, 1996.
- (1996) J. Appl. Phys , vol.80 , pp. 4971
- Kroll, U.¹ Meier, J.² Shah, A.³ Mikhailov, S.⁴ Weber, J.⁵

10
- 0009046053
- B. H. Mahan and M. Sloane. J. Chem. Phys., 59:5661, 1973.
- (1973) J. Chem. Phys. , vol.59 , pp. 5661
- Mahan, B.H.¹ Sloane, M.²

11
- 0000575403
- G. H. Peslherbe and W. L. Hase. J. Chem. Phys, 104:7882, 1996.
- (1996) J. Chem. Phys , vol.104 , pp. 7882
- Peslherbe, G.H.¹ Hase, W.L.²

12
- 6444240255
- W. H. Press, W. T. Vetterling, S. A. Teukolsky, and B. P. Flannery. Cambridge university press, 1999
- W. H. Press, W. T. Vetterling, S. A. Teukolsky, and B. P. Flannery. Cambridge university press, 1999.

13
- 0013430534
- S. Sakai, S. Kato, K. Morokuma, and J. I. Kusunoki. J. Chem. Phys., 75:5398, 1981.
- (1981) J. Chem. Phys. , vol.75 , pp. 5398
- Sakai, S.¹ Kato, S.² Morokuma, K.³ Kusunoki, J.I.⁴

14
- 84988073214
- J. J. P. Stewart. J. Comput. Chem., 10:221, 1989.
- (1989) J. Comput. Chem. , vol.10 , pp. 221
- Stewart, J.J.P.¹

15
- 84988129057
- J. J. P. Stewart. J. Comput. Chem., 10:209, 1989.
- (1989) J. Comput. Chem. , vol.10 , pp. 209
- Stewart, J.J.P.¹

16
- 4243754961
- F. Stillinger and T. Weber. Phys. Rev. B, 31:5262, 1985.
- (1985) Phys. Rev. B , vol.31 , pp. 5262
- Stillinger, F.¹ Weber, T.²

17
- 0000726819
- J. Tersoff. Phys. Rev. Lett., 56:632, 1986.
- (1986) Phys. Rev. Lett. , vol.56 , pp. 632
- Tersoff, J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.