Sensors for closed-loop piezo control: Strain gauges versus optical sensors

Measurement Science and Technology

Volumn 13, Issue 4, 2002, Pages

  Schitter, G ^a   Stark, R W ^a   Stemmer, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Nanopositioning; Optical sensor; Piezo control; Strain gauge

Indexed keywords

ACTUATORS; BANDWIDTH; CLOSED LOOP CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; STRAIN GAGES;

PIEZOELECTRIC ACTUATORS;

OPTICAL SENSORS;

CREEP; MEASUREMENT METHOD; OPTICAL TECHNIQUE; PIEZOELECTRICITY; SENSOR; STRAIN; STRAIN GAUGE;

EID: 0036538448     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/13/4/404     Document Type: Article

References (6)