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Volumn 240, Issue 1-2, 2002, Pages 124-134
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Numerical study of the growth conditions in an MOCVD reactor: Application to the epitaxial growth of HgTe
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Author keywords
A1. Computer simulation; A3. Metal organic chemical vapor deposition; A3. Metalorganic vapor phase epitaxy; A3. Organometallic vapor phase epitaxy; B1. Mercury telluride; B2. Semiconducting II VI materials
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Indexed keywords
CHEMICAL REACTORS;
COMPUTER SIMULATION;
HEAT TRANSFER;
MASS TRANSFER;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
NAVIER STOKES EQUATIONS;
PARTIAL PRESSURE;
SUBSTRATES;
THERMAL EFFECTS;
EPITAXIAL LAYERS;
METALLORGANIC VAPOR PHASE EPITAXY;
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EID: 0036537661
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(02)00919-3 Document Type: Article |
Times cited : (4)
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References (24)
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