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Volumn 240, Issue 1-2, 2002, Pages 124-134

Numerical study of the growth conditions in an MOCVD reactor: Application to the epitaxial growth of HgTe

Author keywords

A1. Computer simulation; A3. Metal organic chemical vapor deposition; A3. Metalorganic vapor phase epitaxy; A3. Organometallic vapor phase epitaxy; B1. Mercury telluride; B2. Semiconducting II VI materials

Indexed keywords

CHEMICAL REACTORS; COMPUTER SIMULATION; HEAT TRANSFER; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NAVIER STOKES EQUATIONS; PARTIAL PRESSURE; SUBSTRATES; THERMAL EFFECTS;

EID: 0036537661     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)00919-3     Document Type: Article
Times cited : (4)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.