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Volumn 183, Issue 4, 1998, Pages 535-544
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Analysis of the CVD in a horizontal reactor II. The epitaxy of CdTe
a,c a,d a b a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
EPITAXIAL GROWTH;
INTERFACES (MATERIALS);
MASS TRANSFER;
MORPHOLOGY;
REACTION KINETICS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR GROWTH;
STOICHIOMETRY;
SUBSTRATES;
SUPERSATURATION;
CADMIUM TELLURIDE;
DIISOPROPYLTELLURIDE;
DIMETHYLCADMIUM;
HORIZONTAL QUARTZ REACTOR;
SEMICONDUCTING CADMIUM COMPOUNDS;
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EID: 0032002570
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00507-1 Document Type: Article |
Times cited : (10)
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References (15)
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