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Volumn 72, Issue 1-4, 2002, Pages 517-523

PEEM - A spectromicroscopic tool for mc-Si surface evaluation

Author keywords

Multicrystalline silicon; PEEM; Photoelectron spectroscopy; Spectromicroscopy

Indexed keywords

BINDING ENERGY; CHEMICAL POLISHING; DISLOCATIONS (CRYSTALS); GRAIN BOUNDARIES; IMAGING TECHNIQUES; PHOTOELECTRON SPECTROSCOPY; PHOTOEMISSION; PRECIPITATION (CHEMICAL); SILICON; SYNCHROTRONS;

EID: 0036533245     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00200-8     Document Type: Conference Paper
Times cited : (4)

References (13)
  • 2
    • 0008525108 scopus 로고
    • Inagura-Dissertation FU Berlin
    • (1968)
    • Engel, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.