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Volumn 72, Issue 1-4, 2002, Pages 517-523
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PEEM - A spectromicroscopic tool for mc-Si surface evaluation
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Author keywords
Multicrystalline silicon; PEEM; Photoelectron spectroscopy; Spectromicroscopy
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Indexed keywords
BINDING ENERGY;
CHEMICAL POLISHING;
DISLOCATIONS (CRYSTALS);
GRAIN BOUNDARIES;
IMAGING TECHNIQUES;
PHOTOELECTRON SPECTROSCOPY;
PHOTOEMISSION;
PRECIPITATION (CHEMICAL);
SILICON;
SYNCHROTRONS;
MULTICRYSTALLINE SILICON;
ELECTRON MICROSCOPY;
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EID: 0036533245
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(01)00200-8 Document Type: Conference Paper |
Times cited : (4)
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References (13)
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