Lateral doping inhomogeneities as revealed by μ-NEXAFS and μ-PES

Solid State Phenomena

Volumn 63-64, Issue , 1998, Pages 317-326

  Mikalo, R P ^a   Hoffmann, P ^a   Heller, Th ^a   Schmeisser D ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPES; MOLYBDENUM COMPOUNDS; PHOTOEMISSION; PLASTIC FILMS; SPECTROSCOPIC ANALYSIS; THIN FILMS; TUNGSTEN COMPOUNDS;

LATERAL DOPING INHOMOGENEITIES;

SEMICONDUCTOR DOPING;

EID: 17344366486     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.63-64.317     Document Type: Article

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