C-H bonding of polymer-like hydrogenated amorphous carbon films investigated by in-situ infrared ellipsometry

Carbon

Volumn 37, Issue 5, 1999, Pages 771-775

  Heitz, T ^a   Drevillon B ^a   Godet, C ^a   Bouree J E ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMORPHOUS FILMS; CHEMICAL BONDS; ELLIPSOMETRY; HELIUM; HYDROGEN; HYDROGENATION; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MICROSTRUCTURE; PLASMA APPLICATIONS;

AMORPHOUS CARBON FILMS;

CARBON;

EID: 0344672409     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00271-1     Document Type: Article

References (17)

1. Robertson J., O'Reilly E.P. Phys Rev B. 35:1987;2946.
2. Kelires P.C. Phys Rev B. 47:1993;1829.
3. Hamakawa Y., Toyama T., Okamoyo H. J Non-Cryst Solids. 115:1989;180.
4. Heitz T, Godet C, Bourée JE, Drévillon B, Chu V, Conde JP, Clerc C. In: Parsons G, Fahlen TS, Morozumi S, Seager C, Tsai CC, editors, Materials Research Society Symposium Proceedings, Vol. 508, San Francisco, 1998.
5. Godet C., Heitz T., Drévillon B., Bourée J.E. J Appl Phys. 84:1998;3919.
6. Heitz T, Drévillon B, Godet C, Bourée JE., Phys. Rev. B 1998; to be published.
7. Canillas A., Bertran E., Andujar J.L., Drévillon B. J Appl Phys. 68:1990;2752.
8. Heitz T. PhD Thesis 1998.
9. Demichelis F., Pirri C.F., Tagliaferro A. Phys Rev B. 45:1992;14364.
10. Koidl P, Wild Ch, Dischler B, Wagner J, Ramsteiner M. Materials science forum, vols. 52,53. Switzerland: Transtech Publications, 1989:41.
11. Wexler AS. Applied spectroscopy reviews. 1967:29-98.
12. Dischler B. Amorphous hydrogenated carbon films. In: Koidl P, Oelhaven P, editors. E-MRS Symposium Proceedinigs, vol. 17. Paris: Les Editions de Physique, 1987:189.
13. Ratajczak H., Orville-Thomas W.J. Trans Faraday Soc. 61:1965;2603.
14. Polo S.R., Wilson M.K. J Chem Phys. 23:1953;2376.
15. Honeybone P.J.R., Newport R.J., Walters J.K., Howells W.S., Tomkinson J. Phys Rev. B. 50:1994;839.
16. Burns W., Mc Kervey M.A., Mitchell T.R., Rooney J.J. J Am Chem Soc. 100:1978;906.
17. Angus J.C., Jansen F. J Vac Sci Technol A. 6:1998;1778.