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Volumn 11, Issue 3-6, 2002, Pages 1143-1148

Paramagnetic centres and microstructure of reactively sputtered amorphous carbon nitride thin films

Author keywords

Carbon nitride; Electron spin resonance; Nitrogen; Paramagnetism

Indexed keywords

CARBON; MICROSTRUCTURE; NITRIDES; PARAMAGNETIC RESONANCE; SPUTTERING;

EID: 0036508229     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00715-4     Document Type: Article
Times cited : (16)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.