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Volumn 11, Issue 3-6, 2002, Pages 1143-1148
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Paramagnetic centres and microstructure of reactively sputtered amorphous carbon nitride thin films
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Author keywords
Carbon nitride; Electron spin resonance; Nitrogen; Paramagnetism
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Indexed keywords
CARBON;
MICROSTRUCTURE;
NITRIDES;
PARAMAGNETIC RESONANCE;
SPUTTERING;
SPIN MOBILITY;
AMORPHOUS FILMS;
CARBON NITRIDE;
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EID: 0036508229
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00715-4 Document Type: Article |
Times cited : (16)
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References (27)
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