Effect of hydrogen on stability of amorphous silicon thin films

Solar Energy Materials and Solar Cells

Volumn 71, Issue 4, 2002, Pages 459-464

  Pietruszko, S M ^a   Jang, J ^b  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Kyung Hee University   (South Korea)

Author keywords

Amorphous silicon; Hydrogen; Metastability

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BORON; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; HYDROGEN; HYDROGENATION; ION IMPLANTATION; PHOSPHORUS; PRESSURE EFFECTS; QUENCHING; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

ISOTHERMAL RELAXATION;

SEMICONDUCTING FILMS;

EID: 0036497713     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00100-3     Document Type: Article

References (3)