Chemical and microstructural characterisation of silicon-containing carbon films

Surface and Coatings Technology

Volumn 151, Issue 152, 2002, Pages 138-143

  Laidani, N ^a   Speranza, G ^a   Calliari, L ^a   Micheli, V ^a   Anderle, M ^a  

^a FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

Diamond like carbon; Infra red spectroscopy; Silicon; Structure; X ray photoelectron spectroscopy

Indexed keywords

ELECTRONIC STRUCTURE; GRAPHITE; MAGNETRON SPUTTERING; MICROSTRUCTURE; PERTURBATION TECHNIQUES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

SILICON;

CARBON; GRAPHITE; SILICON;

CHEMICAL STRUCTURE; DIAMOND-LIKE CARBON; INORGANIC COATING; MICROSTRUCTURE;

BIOFILM; CHEMICAL BOND; CHEMICAL STRUCTURE; FILM; HYBRIDIZATION; OSCILLATION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036495998     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01627-9     Document Type: Article

References (21)