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Journal of Sol-Gel Science and Technology

Volumn 23, Issue 3, 2002, Pages 235-245

Photolithographic patterning and doping of silica xerogel films

(6) Bohannan, Eric W a Gao, Xuerong a Gaston, Kimberly R a Doss, Christopher D a Sotiriou Leventis, Chariklia a Leventis, Nicholas a

a MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY (United States)

Author keywords

Doping; Films; Methylene blue; Photolitography; Sol gel

Indexed keywords

CATALYSIS; DYES; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SILICA; SOL-GELS; SOLUTIONS; SPIN COATING; SURFACE STRUCTURE;

INTERDIGITATED ARRAY PATTERN; PHOTOLITHOGRAPHIC PATTERNING; SILICA XEROGEL FILM;

SEMICONDUCTING FILMS;

EID: 0036494805 PISSN: 09280707 EISSN: None Source Type: Journal
DOI: 10.1023/A:1013974915198 Document Type: Article

Times cited : (19)

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