Combinatorial approach to the oxidation resistance of (Ti, Al)N and Ti-Al-Si-N hard coatings

Acta Metallurgica Sinica (English Letters)

Volumn 15, Issue 1, 2002, Pages 6-14

  Cremer, R ^a   Neuschutz, D ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Combinatorial chemistry; Hard coating; Magnetron sputtering; PVD

Indexed keywords

ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COATINGS; MAGNETRON SPUTTERING; TITANIUM NITRIDE;

COMBINATORIAL CHEMISTRY; HARD COATINGS;

OXIDATION RESISTANCE;

EID: 0036485606     PISSN: 10067191     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)