Deposition and characterization of Ge-Sb-Te layers for applications in optical data storage

Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 55-60

  Kyrsta, S ^a   Cremer, R ^a   Neuschutz D ^a   Laurenzis, M ^a   Haring Bolivar, P ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Ge Sb Te; Magnetron sputtering; Optical data storage; Phase change

Indexed keywords

AMORPHIZATION; COMPOSITION EFFECTS; CRYSTALLIZATION; GERMANIUM COMPOUNDS; MAGNETRON SPUTTERING; MULTILAYERS; OPTICAL DISK STORAGE; PHOTODETECTORS; PULSED LASER APPLICATIONS; SEMICONDUCTOR LASERS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON PROBE MICROANALYSIS (EPMA);

OPTICAL FILMS;

EID: 0035898822     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00263-X     Document Type: Article

References (6)