Novel cleaning methodology for steel substrates in microelectronic fabrication

Journal of the Electrochemical Society

Volumn 149, Issue 2, 2002, Pages

  Howell, Robert S ^a   Hatalis, Miltiadis K ^a  

^a Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; PROBABILITY; SCREENING; STAINLESS STEEL; STATISTICAL METHODS; SUBSTRATES; ULTRASONICS;

MICROELECTRONIC FABRICATION;

CLEANING;

EID: 0036476079     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1433474     Document Type: Article

References (5)