Crystalline silicon thin films with porous Si backside reflector

Thin Solid Films

Volumn 403-404, Issue , 2002, Pages 170-174

  Bilyalov, R ^a   Solanki, C S ^a   Poortmans, J ^a   Richard, O ^a   Bender, H ^a   Kummer, M ^b   Von Kanel H ^b  

^a IMEC   (Belgium)

^b ETH ZURICH   (Switzerland)

Author keywords

Light trapping; Porous Si; Thin films

Indexed keywords

CRYSTALLINE MATERIALS; INTERFACES (MATERIALS); MIRRORS; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

LIGHT TRAPPING;

THIN FILMS;

EID: 0036467922     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01557-7     Document Type: Conference Paper

References (11)