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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 179, Issue 4, 2001, Pages 485-496

Density and binding effects in low-energy sputtering

(1) Shulga, V I a

a MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

Computer simulation; Density and binding effects; Depth of origin; Sputtering; Sputtering yield

Indexed keywords

AMORPHOUS MATERIALS; BINDING ENERGY; COMPUTER SIMULATION; ION BOMBARDMENT; TARGETS;

BOMBARDING ENERGY;

SPUTTERING;

EID: 0035447594 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00602-4 Document Type: Article

Times cited : (7)

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