Peak movement detection method of an equally spaced fringe for precise position measurement

Optical Engineering

Volumn 41, Issue 2, 2002, Pages 428-434

  Yi, Jong Hoon ^a   Kim, Soo Hyun ^a   Kwak, Yoon Keun ^a   Lee, Yun Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Displacement measurement; Fringe movement; Fringe peak detection; Least square method

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ERROR ANALYSIS; LEAST SQUARES APPROXIMATIONS; POSITION MEASUREMENT; SIGNAL INTERFERENCE; SIGNAL PROCESSING;

FRINGE PEAK MOVEMENT; PEAK MOVEMENT DETECTION METHOD; PHASE INFORMATION; SPATIAL INTERFERENCE;

INTERFEROMETRY;

EID: 0036465012     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1431253     Document Type: Article

References (9)

1. Force microscope using a fiber optic displacement sensor
2. High-accuracy distance measurements with multiple-wavelength interferometry
3. Heterodyne absolute distance interferometer with a dual-mode HeNe laser
4. Recent advances in displacement measuring interferometry
5. Nonlinearity in measurements of length by optical interferometry
6. Determination and correction of quadrature fringe measurement errors in interferometer
7. Correction of nonlinearity in one-frequency optical interferometry
8. Phase-shifted image matching algorithm for displacement measurement
9. Algorithm immune to tilt phase-shift error for phase-shift interferometers