Molecular dynamics simulation of copper thin film growth on β-Ta (002) substrate

Materials Research Society Symposium - Proceedings

Volumn 721, Issue , 2002, Pages 79-83

  Li, Youhong ^a   Adams, James B ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER SIMULATION; COPPER; DIFFUSION; FILM GROWTH; METALLIZING; MOLECULAR DYNAMICS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

ENERGY DATA;

THIN FILMS;

EID: 0036456844     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-721-j3.7     Document Type: Conference Paper

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