Silicon self-interstitial cluster formation and dissolution in SOI

Materials Research Society Symposium - Proceedings

Volumn 717, Issue , 2002, Pages 95-100

  Saavedra, A ^a   Frazer, J ^a   Wrigley, D ^a   Jones, K ^a   Avci, I ^a   Earles, S ^a   Law, M ^a   Jones, E ^b  

^a University of Florida   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CMOS INTEGRATED CIRCUITS; CRYSTAL DEFECTS; SEMICONDUCTOR JUNCTIONS; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

CLUSTER FORMATION;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0036449852     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-717-c2.5     Document Type: Conference Paper

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