Perspectives of laser processing and chemistry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue I, 2002, Pages 11-18

  Bäuerle, Dieter ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Ablation; Etching; Laser chemistry; Laser cleaning; Pulsed laser deposition; Surface modifications

Indexed keywords

ETCHING; LASER CHEMISTRY; OPTICAL FIBERS; PULSED LASER DEPOSITION; SURFACE TREATMENT; THIN FILMS;

LASER PROCESSING;

LASER OPTICS;

EID: 0036446653     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482081     Document Type: Conference Paper

References (24)

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5. 2 microspheres", Applied Physics A (2002a).
6. K. Piglmayer, R. Denk, and D. Bäuerle, "Laser-induced surface patterning by means of microspheres", to be published.
7. R. Denk, K. Piglmayer, and D. Bäuerle, "Laser-induced nanopatterning by means of interference-subpatterns generated by microspheres", Applied Physics A (2002b).
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19. N. Huber, J. Gruber, N. Arnold, J. Heitz, and D. Bäuerle, "Time-resolved photography of the plasma-plume and ejected particles in laser ablation of polytetrafluoroethylene", Europhys. Lett. 51, pp. 674-678, 2000.
20. V. Svorcik, K. Walachová, J. Heitz, T. Gumpenberger, and L. Bacáková, "Muscle cell adhesion on polytetrafluorethylene modified by UV irradiation", J. Mater. Sci. Lett. 20, pp. 1941-1942, 2001.
21. T. Fourrier, G. Schrems, T. Mühlberger, J. Heitz, N. Arnold, D. Bäuerle, M. Mosbacher, J. Boneberg, and P. Leiderer, "Laser cleaning of polymer surfaces", Appl. Phys. A 72, pp. 1-6, 2001.
22. N. Arnold, G. Schrems, T. Mühlberger, M. Mosbacher, P. Leiderer, M. Bertsch, and D. Bäuerle, "Dynamic particle removal by nanosecond dry laser cleaning: Theory", Conference Proceedings of the International Workshop 'New Trends in Laser Cleaning' Singapore, May 2001, to be published in Proc. SPIE as part of LPM2001 Proceedings.
23. M. Mosbacher, H.-J. Münzer, V. Dobler, M. Bertseh, O. Dubbers, T. Mühlberger, G. Schrems, J. Boneberg, D. Bäuerle, J. Solis, R. Oltra, P. Leiderer, and B.-U. Runge, "Laser cleaning of silicon wafers - Mechanisms and Efficiencies", LPM2001, Singapore May 16-18, 2001, Proc. SPIE 2001.
24. H.J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, F. Burmeister, A. Pack, R. Wannemacher, B.-U. Runge, D. Bäuerle, J. Boneberg, and P. Leiderer, "Optical near field effects in surface nanostructuring and laser cleaning", LPM2001, Singapore May 16-18, 2001, Proc. SPIE 2001.