Diamond-Like carbon deposited by femtosecond pulsed laser ablation: Evidence of nanocrystalline diamond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue I, 2002, Pages 301-308

  Garrelie, F ^a   Loir, A S ^a   Goutaland, F ^a   Donne, C ^a   LeHarzic, R ^a   Angleraud, B ^b   Ouerdane, Y ^a   Laporte, P ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

^b INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

Author keywords

Diamond Like Carbon; Femtosecond laser; Pulsed Laser Deposition; Raman spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAPHITE; LASER ABLATION; LASER PULSES; NANOSTRUCTURED MATERIALS; PLASMA APPLICATIONS; PULSED LASER DEPOSITION; RAMAN SCATTERING; SILICON; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

PULSED LASER ABLATION;

DIAMOND LIKE CARBON FILMS;

EID: 0036445738     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482098     Document Type: Conference Paper

References (27)

1. Pulsed Laser Deposition of Thin Films, D.B. Chrisey and C.K. Hubler eds, Naval Research Laboratory, Washington, DC 1994.
2. A.A. Voevodin, M.S. Donley, "Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review", Surface and Coatings Technology 82, pp 199-213, 1996.
3. D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, "Pulsed Laser Deposition of diamond like carbon films", Journal of Applied Physics 71 (11), pp 5675-5684, 1992.
4. V.I. Merkulov, D.H. Lowndes, G.E. Jellison, A.A. Puretzky, D.B. Geohegan, "Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy", Applied Physics Letters 73(18), pp 2591-2593, 1992.
5. M. Bonelli, A.P. Fioravanti, A. Miotello, P.M. Ossi, "Structural and mechanical properties of ta-C films grown by pulsed laser deposition", Europhysics Letters 50(4), pp 501-506, 2000.
6. A.K. Sharma, R.J. Narayan, J. Narayan, K. Jagannadham, "Structural and tribological characteristics of diamond-like carbon films deposited by pulsed laser ablation", Materials Science and Engineering B77, pp 139-143, 2000.
7. K.S. Shim, S.M. Kim, S. Hyuck Bae, S. Yeol Lee, H.S. Jung, H.H. Park, "Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition", Applied Surface Science 154/155, pp 482-484, 2000.
8. N. Matsuyama, K. Yukimura, T. Maruyama, "Amorphous diamond-like carbon film prepared by pulsed laser deposition with application of pulsed negative bias voltage", Journal of Applied Physics 89(3), pp 1938-1941, 2001.
9. Q. Wei, J. Sankar, J. Narayan, "Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation", Surface and Coatings Technology 146/147, pp 250-257, 2001.
10. A.V. Rode, B. Luther-Davies, E.G. Gamaly, "Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films", Journal of Applied Physics 85(8), pp 4222-4230, 1999.
11. S. Rey, F. Antony, B. Prevot, E. Fogarassy, J.C. Arnault, J. Hommet, F. Le Normand, P. Boher, "Thermal stability of amorphous carbon films deposited by pulsed laser ablation", Applied Physics A: Materials Science and Processing 71, pp 433-439, 2000.
12. F. Qian, v. Craciun, R.K. Singh, S.D. Dutta, P.P. Pronko, "High intensity femtosecond laser deposition of diamond-like carbon thin films", Journal of Applied Physics 86(4), pp 2281-2290, 1999.
13. P.S. Banks, L. Dinh, B.C. Stuart, M.D. Felt, A.M. Komashko, A.M. Rubenchick, M.D. Perry, W. McLean," Short pulse laser deposition of diamond-like carbon thin films", Applied Physics A 69, pp S347-S353, 1999.
14. F. Garrelie, C. Jonin, E. Baubeau, E. Audouard, P. Laporte, A. Catherinot, C. Champeaux, "Femtosecond laser ablation of graphite: study of plasma plume and thin film deposition", CLEO CFK5, May 7-12 2000, 615.
15. M. Okoshi, S. Higuchi, M. Hanabusa, "Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films", Journal of Applied Physics 86(3), pp 1768-1770, 1999.
16. D.S. Yao, J.R. Liu, L.G. Wang, C.X. Yu, R.J. Zhan, "Deposition of diamond-like carbon films with femtosecond KrF Laser Pulses", Chinese Physics Letters 17(7), pp 540-541, 2000.
17. B. Angleraud, F. Garrelie, F. Tetard, A. Catherinot, "Study of particles ejected after pulsed laser ablation of a graphite target", Applied Surface Science 138/139, pp 507-511, 1999.
18. J.C.S. Kools, T.S. Batler, S.T. de Zwart and J. Dieleman, "Gas flow dynamics in laser ablation deposition", Journal of Applied Physics 71(9), pp 4547-4556, 1992.
19. J. Badziak, P. Parys, A.B. Vankov, J. Wolowski, E. Woryna, "Generation of fluxes of highly charged heavy ions from picosecond laser produced plasma", Applied Physics Letters 79 (11), pp 21-23, 2001.
20. P.A. VanRompay, M. Nantel, P.P. Pronko, "Pulse contrast effects on energy distributions of C1+ to C4+ ions for high intensity 100-fs laser ablation plasmas", Applied Surface Science 127-129, pp 1023-1028, 1998.
21. F. Garrelie, A.S. Loir, C. Donnet, F. Rogemond, R. LeHarzic, M. Belin, E. Audouard, P. Laporte, "Femtosecond pulsed laser deposition of diamond-Like carbon thin films for tribological applications", Surface and Coatings Technology, submitted.
22. R.J. Nemanich, J.T. Glass, G. Lucovsky, R.E. Shroder, "Raman scattering characterization of carbon bonding in diamond and diamondlike films", Journal of Vacuum Science and Technologies A 6(3), pp 1783-1787, 1988.
23. J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S.R.P. Silva, J. Robertson, R. Samlenski, R. Brenn, "Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion platting", Journal of Applied Physics 79 (3), pp 1416-1422, 1996.
24. T. Sharda, T. Soga, T. Jimbo, M. Umeno, "Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition", Diamond and Related Materials 10, pp 1592-1596, 2001.
25. S.R.P. Silva, G.A.J. Amaratunga, E.K.H. Salje, K.M. Knowles, "Evidence of hexagonal diamond in plasma deposited carbon films", Journal of Materials Science 29, pp 4962-4966, 1994.
26. -1 Raman mode in nanocrystalline diamond", Physical Review B 63, pp 121405, 2001.
27. L. Vandenbulcke, D. Rats, M.I. De Barros, R. Benoit, R. Erre, P. Andreazza, "Two-step process for improved diamond deposition on titanium alloys at moderate temperature", Applied Physics Letters 72(4), pp 501-503, 1998.