Particulates in pulsed laser deposition: Formation mechanisms and possible approaches to their elimination

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4762, Issue , 2002, Pages 64-74

  Mihailescu, I N ^a   Teodorescu, V S ^a   Gyorgy, E ^a   Ristoscu, C ^a   Cristescu, R ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Particulates; Pulsed laser irradiation; Thin films deposition

Indexed keywords

COMPUTER SIMULATION; IRRADIATION; LASER ABLATION; LASER BEAMS; LIGHT PROPAGATION; NUMERICAL METHODS; PARTICLES (PARTICULATE MATTER); THIN FILMS;

PULSED LASER IRRADIATION; THIN FILMS DEPOSITION;

PULSED LASER DEPOSITION;

EID: 0036440044     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.478666     Document Type: Article

References (28)

1. D. G. Chrisey, G. K. Hubler (eds), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994
2. M. Von Allmen, A. Blatter, Laser-Beam Interactions with Materials, 2nd edn., Springer, Berlin, 1995
3. D. Bauerle, Laser Processing and Chemistry, 2nd edn., Springer, Berlin, 1996
4. Ion N. Mihailescu, Eniko Gyorgy, "Pulsed Laser Deposition: An Overview", Invited contribution to the 4-th International Commission for Optics (ICO) Book "Trends in Optics and Photonics", ed. T. Asakura (ICO President), Springer Series in Optical Science, 201-214 (1999)
5. E. Fogarassy, A. Slaoui, C. Fuchs, J. P. Stoquet, Appl. Surf. Sci. 46, p. 195, 1990
6. I. N. Mihailescu, N. Chitica, V. S. Teodorescu, M. L. De Giorgi, M. Leggieri, A. Luches, A. Perrone, B. Dubreuil, J. Vac. Sci. Technol. A., 11, p. 2577, 1993
7. V. Craciun, D. Craciun, I. W. Boyd, Materials Sci. Eng. B, 18, p. 178, 1993
8. C. M. Williams, D. B. Chrisey, P. Lubitz, K. S. Grabowski, C. M. Cotell, J. Appl. Phys., 75, p. 1676, 1994
9. G. Leggieri, A. Luches, M. Martino, A. Perrone, G. Majni, P. Mengucci, I. N. Mihailescu, Thin Solid Films, 258, p. 40, 1995
10. J. Bulir, M. Jelinek, V. Vorlicek, J. Zemek, V. Perina, Thin Solid Films, 292, p. 318, 1997
11. P. A. Atanasov, M. E. Koleva, R. I. Tomov, V. I. Krastev, J. Mater. Sci: Mater. El. 10, p. 295, 1999
12. K. Murakami, in Laser Ablation of Electronic Materials - Basic Mechanisms and Applications, ed. by E. Fogarassy, S. Lazare, Elsevier, Amsterdam, p. 125, 1992
13. R. Kelly, J. Rothenberg, Nucl. Instrum. Methods B 7/8, p. 755, 1985
14. A. B. Brailovsky, S. V. Gaponov, V. I. Luchin, Appl. Phys. A 61, p. 81, 1995
15. B. Holzapfel, B. Roas, L. Schultz, P. Bauer, G. Saemann-Ischenko, Appl. Phys. Lett. 61, p. 3178, 1992
16. M. Iwabuchi, K. Kinoshita, T. Ishibashi, T. Kobayashi, Jpn. J. Appl. Phys. 33, p. L610, 1994
17. S. Witanachchi, K. Ahmed, P. Sakthivel, P. Mukherjee, Appl. Phys. Lett. 66, p. 1469, 1995
18. D. Lubben, S. A. Barnett, k. Suzuki, S. Gorbatkin, J. E. Greene, J. Vac. Sci. Techn. B, 3, pp. 968, 1985
19. V. S. Teodorescu, I. N. Mihailescu, E. Gyorgy, A. Luches, M. Martino, L. C. Nistor, J. Van Landuyt, J. Hermann, J. Mod. Opt. 43, p. 1773, 1996
20. I. N. Mihailescu, Lita, V. S. Teodorescu, E. Gyorgy, R. Alexandrescu, A. Luches, M. Martino, A. Barborica, J. Vac. Sci. Technol. A, 14, p. 1986, 1996
21. G. Leggieri, A. Luches, M. Martino, A. Perrone, R. Alexandrescu, A. Barborica, E. Gyorgy, I. N. Mihailescu, G. Majni, P. Mengucci, Appl. Surf. Sci. 96, p. 866, 1996
22. N. Chitica, E. Gyorgy, A. Lita, G. Marin, I. N. Mihailescu, D. Pantelica, M. Petrascu, A. Hatziapostolou, C. Grivas, N. Broll, A. Cornet, C. Mirica, A. Andrei, Thin Solid Films, 301, p. 71, 1997
23. I. N. Mihailescu, V. S. Teodorescu, E. Gyorgy, A. Luches, A. Perrone, M. Martino, J. Phys. D: Appl. Phys. 31, p. 2236, 1998
24. I. N. Mihailescu, E. Gyorgy, V. S. Teodorescu, Gy. Steinbrecher, J. Neamtu, A. Perrone, A. Luches, J. Appl. Phys., 86, p. 7123, 1999
25. A. Miotello, R. Kelly, Appl. Phys. Lett. 67, p. 3535, 1995
26. R. V. Arutyunyan, V. Yu. Baranov, L. A. Bolshov, D. D. Malyuta, A. Yu. Sebrant "Laser Beam Effects on Materials", Nauka, Moscow, 1989 (in Russian)
27. T. D. Bennet, G. P. Grigoropoulos, D. J. Krajnovich, J. Appl. Phys. 77, p. 849, 1995
28. A. B. Brailovsky, S. V. Gaponov, V. I. Luchin, Appl. Phys. A: Solid Surf. 61, p. 81, 1995