Deposition of BN thin films onto Si(1 0 0) substrate by PLD with nanosecond and femtosecond pulses in nitrogen gas background

Applied Surface Science

Volumn 197, Issue 198, 2002, Pages 499-504

  Luculescu, C R ^a   Miyake, H ^a   Sato, S ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

c BN; Femtosecond laser pulse; PLD

Indexed keywords

BORON COMPOUNDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HOT PRESSING; LASER PULSES; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NITROGEN COMPOUNDS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

FEMTOSECOND LASER PULSE;

THIN FILMS;

EID: 0036424873     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00325-2     Document Type: Article

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