Quantification of image quality

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4691 I, Issue , 2002, Pages 169-178

  Tat, Pong Wing ^a   Wong, Alfred ^a  

^a UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Aberrations; Chromium on glass (COG); Combination; ED window; Extraction; Mask error factor; Normalization; Normalized image log slope; Normalized process latitude; Sigrnoid function

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; DYNAMIC RANDOM ACCESS STORAGE; ERROR ANALYSIS; IMAGE QUALITY; MASKS;

MASK ERROR FACTORS;

PHOTOLITHOGRAPHY;

EID: 0036413061     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474529     Document Type: Conference Paper

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