Manufacturing of an optical quality mirror system for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4493, Issue , 2002, Pages 13-20

  Perreault, Julie A ^a   Bierden, Paul A ^a   Horenstein, Mark N ^a   Bifano, Thomas G ^a  

^a Boston University   (United States)

Author keywords

Aberrations; Actuators; Adaptive optics; Chemo mechanical polishing; Evaporation; Ion machining; Micromachined; Mirrors; Optical quality; Reflectivity

Indexed keywords

ABERRATIONS; ACTUATORS; ADAPTIVE OPTICS; COATING TECHNIQUES; GOLD; LIGHT REFLECTION; MANUFACTURE; PERFORMANCE; POLISHING; QUALITY CONTROL; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

CHEMO-MECHANICAL POLISHING; DEFORMABLE MIRRORS; OPTICAL QUALITY;

MIRRORS;

EID: 0036396881     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.454703     Document Type: Conference Paper

References (5)

1. J.W. Hardy, Adaptive Optics for Astronomical Telescopes, Oxford University Press, New York, 1968, Chapter 2.
2. R.J. Tyson, Principles of Adaptive Optics, Academic Press, San Diego, CA 1990.
3. T. Bifano, R. Krishnamoorthy Mali, J. Dorton, J. Perreault, N. Vandelli, M. Horenstein, D. Castañon, "Continuous membrane, surface micromachined, silicon deformable mirror," Optical Engineering, Vol. 36, no. 5, (May 1997), pp. 1354-1360.
4. R.K. Mali, "MEMS Deformable Mirrors for Adaptive Optics", Ph.D. dissertion, Boston University, 1999.
5. T.G. Bifano, J. Perreault, R. Krishnamoorthy Mali, M.N. Horenstein, "Microelectromechanical Deformable Mirrors", IEEE Journal of Selected Topics in Quantum Electronics, Vol. 5, no. 1, pp. 83-89, January/February 1999.