Compact adaptive optical compensation systems using continuous silicon deformable mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4493, Issue , 2002, Pages 35-40

  Reimann, Greg ^a   Perreault, Julie ^a   Bierden, Paul ^a   Bifano, Thomas ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Adaptive optics; Deformable mirror; MEMS; MOEMS

Indexed keywords

ABERRATIONS; ACTUATORS; ADAPTIVE OPTICS; INTEGRATED OPTICS; MICROELECTROMECHANICAL DEVICES; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; SEMICONDUCTING SILICON;

ADAPTIVE OPTICAL COMPENSATION SYSTEMS; DEFORMABLE MIRRORS; OPTICAL SYSTEM RESOLUTION; STREHL RATIO;

MIRRORS;

EID: 0036395082     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.454725     Document Type: Conference Paper

References (5)

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2. Bifano, T. G., "MEMS deformable mirrors for wavefront correction," Proceedings of SPIE - the International Society for Optical Engineering Proceedings of the 2000 High-Resolution Wavefront Control: Methods, Devices, and Applications SPIE 4124 San Diego, CA, USA, Sponsored by: SPIE Society of Photo-Optical Instrumentation Engineers Bellingham WA USA. Aug 1-2, 2000.
3. Weyrauch, T., Vorontsov, M. A., Bifano, T. G.,Tuantranont, A., Bright, V. M., "Performance evaluation of micromachined mirror arrays for adaptive optics," Proceedings of SPIE - the International Society for Optical Engineering Proceedings of the 2000 High-Resolution Wavefront Control: Methods, Devices, and Applications SPIE 4124 San Diego, CA, USA, Sponsored by: SPIE Society of Photo-Optical Instrumentation Engineers Bellingham WA USA. Aug 1-2, 2000.
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5. M.A. Vorontsov, G.W. Carhart, M. Cohen, and G. Cauwenberghs. Adaptive optics based on analog parallel stochastic optimization: Analysis and experimental demonstration. Journal of the Optical Society of America A, [17] pp. 1440-1453, 2000.