Lattice spacing mapping in large silicon ingot using high resolution lattice comparator

CPEM Digest (Conference on Precision Electromagnetic Measurements)

Volumn , Issue , 2002, Pages 304-305

  Fujimoto, H ^a   Waseda, A ^a   Xiaowei, Z ^a   Nakayama, K ^a   Fujii, K ^a   Sugiyama, H ^b   Ando, M ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARATOR CIRCUITS; CRYSTAL LATTICES; INGOTS; INTERFEROMETERS; MONOCHROMATORS;

AVOGADRO CONSTANT; LATTICE COMPARATOR; MOLAR VOLUME;

SILICON;

EID: 0036388828     PISSN: 05891485     EISSN: None     Source Type: Journal    
DOI: 10.1109/CPEM.2002.1034842     Document Type: Article

References (8)

1. Former National Research Institute of Metrology
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